Silicon VLSI Technology
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출판사 리뷰
출판사 리뷰
목차
목차
Chapter 1 Introduction and Historical Perspective
Chapter 2 Modern CMOS Technology
Chapter 3 Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers
Chapter 4 Semiconductor Manufacturing-Clean Rooms, Wafer Cleaning, and Gettering
Chapter 5 Lithography
Chapter 6 Thermal Oxidation and the Si/Sio₂Interface
Chapter 7 Dopant Diffusion
Chapter 8 Ion Implantation
Chapter 9 Thin Film Deposition
Chapter 10 Etching
Chapter 11 Back-End Technology
Appendices
Index
Chapter 2 Modern CMOS Technology
Chapter 3 Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers
Chapter 4 Semiconductor Manufacturing-Clean Rooms, Wafer Cleaning, and Gettering
Chapter 5 Lithography
Chapter 6 Thermal Oxidation and the Si/Sio₂Interface
Chapter 7 Dopant Diffusion
Chapter 8 Ion Implantation
Chapter 9 Thin Film Deposition
Chapter 10 Etching
Chapter 11 Back-End Technology
Appendices
Index
저자
저자
Plummer
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